JPH0195278U - - Google Patents
Info
- Publication number
- JPH0195278U JPH0195278U JP19163987U JP19163987U JPH0195278U JP H0195278 U JPH0195278 U JP H0195278U JP 19163987 U JP19163987 U JP 19163987U JP 19163987 U JP19163987 U JP 19163987U JP H0195278 U JPH0195278 U JP H0195278U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- carrier
- water vapor
- liquid tank
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19163987U JPH0195278U (en]) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19163987U JPH0195278U (en]) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195278U true JPH0195278U (en]) | 1989-06-23 |
Family
ID=31482542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19163987U Pending JPH0195278U (en]) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195278U (en]) |
-
1987
- 1987-12-16 JP JP19163987U patent/JPH0195278U/ja active Pending
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